Advanced diffusion furnaces for semiconductor, photovoltaic, thin film and nano-material processing applications.
Thermco Systems
World class diffusion solutions
Thermco horizontal diffusion furnaces
- 3 & 4 stack systems for volume production
- Small footprint R&D systems
- Automation options
- Industry standard TMX control
Semitherm vertical diffusion furnaces
- Very small footprint
- Unique design features for improved process
- Cost competitive
- Industry standard TMX control
Thermco was established in 1962 and has been providing equipment and support to the semiconductor industry ever since, with probably the largest worldwide installed base of horizontal diffusion furnaces.
We supply and support users worldwide from our headquarters and manufacturing facility in the UK, and through our network of partners.
The combined Thermco and Semitherm product ranges provide a complete new equipment solution. In addition Thermco also offers application specific designs, refurbished pre-owned equipment, automation support, service and equipment decommissioning, parts support and board repairs.