Automation & Enhancements

• Novus Elevators
  For automatic transfer of full wafer loads from load or transfer station to all four tubes
• Nitrogen Purge Loading Systems
  Providing an N₂ purged load and unload environment to reduce native oxide growth. This load mechanism can be used with both atmospheric and CVD processes and has for example been implemented on systems designed for ultra thin oxide growth, and high vaccuum anneal for LED production
• High Flow External Torch
  Thermco high flow external torches in both air and water cooled configurations for improved oxide uniformity
• Symmetrical Scavengers
  For improved by-product extract, improved process control and repeatability