'Mini' Systems (Small Footprint / R&D Systems)

When footprint or height are an issue we can supply 'Thermco' furnaces engineered to meet your specific space limitations:

• TMX or digitally controlled systems for wafer processing up to 200mm in 2, 3 & 4 tube configurations
• All major atmospheric and LPCVD processes are supported
• Systems built to your specific requirement for height, footprint, level of automation and complexity
• Ideal solutions for small volume production, back up, or R&D applications
• Single or two tube bench mount systems for R&D with integrated gas systems and temperature control
• New 2660 design with integrated cantilever loading