Thermco HTR Diffusion Systems

Tetreon manufactures the full range of 'Thermco' four stack furnaces, suitable for 75-200mm wafer processing utilising the industry leading TMX control system. All major atmospheric and LPCVD processes are supported. We can also provide systems for R&D or production applications where space and footprint is critical.

• Models 4500, 4900, 5100 and 5200 standard systems with 3 or 5 zone temperature control, providing a 30" or 40" flat zone
• Model 6200 ACFM system with special auto-locating elements and other automation compatible features
• Series 4000 & 5000 load stations providing an ultra clean loading environment [class 10]
• All major atmospheric and LPCVD processes are supported, and systems can be supplied with process guarantees
• Thermco systems are the most widely installed horizontal furnaces for production at 150mm and below, and are used by most major semiconductor manufacturers